VESA Gas Delivery System Cabinet VIISta HCS

Varian Semiconductor Equipment
Varian SDS Gas Box Delivery System for the
VIISta HCS Single-Wafer High Current Ion Implanter

Slight impact in transit - Box does not site 100% level
Agent's Comment:
"The gas delivery enclosure shows no apparent visible damage to the gas box enclosure or to the internal components. There was no leak test or any other testing of parts completed by VSEA and no specific damage that I was able to verify with VSEA. Regardless, VSEA still recommended that the gas box enclosure be replaced which the customer did for about $387,000."

 

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